Citation: | XU Le, ZHANG Chun-lei, DAI Lei, ZHANG Jian. Research on manufacturing method of non-rotationally symmetrical aspheric surface with high accuracy[J].Chinese Optics, 2016, 9(3): 364-370.doi:10.3788/CO.20160903.0364 |
[1] |
王贵林,李圣怡,戴一帆.光学非球面复合加工机床的设计与精度分析[J].中国机械工程,2004,15(2):99-102.
WANG G L,LI SH Y,DAI Y F. Design method and accuracy analysis of aspherical optical compound machine tool[J].
中国机械工程,2004,15(2):99-102.(in Chinese)
|
[2] |
袁巨龙,吴喆,吕冰海,等.非球面超精密抛光技术研究现状[J].机械工程学报,2012,48(23):167-177.
YUAN J L,WU ZH,LV B H,
et al.. Review on ultra-precision polishing technology of aspheric surface[J].
J. Mechanical Engineering,201248(23):167-177.(in Chinese)
|
[3] |
潘超,陈家璧,张荣福,等.用位相板实现景深延拓的原理与模拟实验研究[J].光子学报,2009,38(7):1679-1682.
PAN CH,CHEN J B,ZHANG R F,
et al.. Study on principle and simulation of extending of depth of field with phase plate[J].
Acta Photonica Sinica,2009,38(7):1679-1682.(in Chinese)
|
[4] |
BEAUCAMP A,FREEMAN R,MORTON R,
et al.. Removal of diamond-turning signatures on X-ray mandrels and metal optics by fluid-jet polishing[J].
SPIE,2008,7018:351-359.
|
[5] |
GAO SH,KANG R K,GUO D M,
et al.. Study on the subsurface damage distribution of the silicon wafer ground by diamond wheel[J].
Advanced Materials Research,2010,126-128:113-118.
|
[6] |
SURATWALA T I,WONG L L,MILLER P E,
et al.. Sub-surface mechanical damage distributions during grinding of fused silica[J].
J. Non-Crystalline Solids,2006,352(52-54):5601-5617.
|
[7] |
张健,代雷,王飞,等.小磨头自适应抛光抑制高精度非球面中频误差[J].光学学报,2013,33(8):0822022.
ZHANG J,DAI L,WNAG F,
et al.. Restraint of mid-spatial-frequency aspheric surface by small-tool aptive polishing[J].
Acta Optica Sinica,2013,33(8):0822022.(in Chinese)
|
[8] |
高松涛,王高文,张健,等.用计算全息图校正非球面的畸变[J].光学 精密工程,2013,21(8):1929-1935.
GAO S T,WANG G W,ZHANG J,
et al.. Correction of distortion in asphere testing with computer-generated hologram[J].
Opt. Precision Eng.,2013,21(8):1929-1935.(in Chinese)
|
[9] |
曲兴田,王宏一,樊成,等.重叠率螺旋线的非球面抛光轨迹规划[J].西安交通大学学报,2015,49(6):y1-y7.
QU X T,WANG H Y,FAN CH,
et al.. Uniform-overlap-rate spiral path for aspheric polishing[J].
J. Xi'an Jiaotong University,2015,49(6):y1-y7.(in Chinese)
|
[10] |
周旭升,李圣怡,戴一帆,等.光学表面中频误差的控制方法-确定区域修正法[J].光学 精密工程,2007,15(11):1668-1673.
ZHOU X SH,LI SH Y,DAI Y F,
et al.. Correcting errors indefinite area: a new method for controlling mid-spatial-frequency errors in optical surface[J].
Opt. Precision Eng.,2007,15(11):1668-1673.(in Chinese)
|
[11] |
邓伟杰,张峰,郑立功.边缘效应的去除函数模型及实验[J].红外与 工程,2011,40(9):1473-1478.
DENG W J,ZHANG F,ZHENG L G. Removal functionmodel and experiment of edge effect[J].
Infrared and Laser Engineering,2011,40(9):1743-1748.(in Chinese)
|
[12] |
孔繁星,于正林,朴承镐,等.基于UMAC加工非球面光学零件PVT控制轨迹研究[J].长春理工大学学报,2009,32(2):196-206.
KONG F X,YU ZH L,PIAO CH H,
et al.. J. Research on PVT control trajectory of processing aspheric optical parts based on UMAC[J].
J. Changchun University of Science and Technology,2009,32(2):196-206.(in Chinese)
|
[13] |
胡陈林,毕果,叶卉,等.光学元件磨削加工亚表面损伤检测研究[J].人工晶体学报2014,43(11):2929-2934.
HU CH L,BI G,YE H,
et al.. Research on detection of subsurface damage on grinding optical elements[J].
J. Synthetic Crystals,2014,43(11):2929-2934.(in Chinese)
|
[14] |
GENIN F Y,SALLEO A,PISTOR T V,
et al.. Role of light intensification by cracks in optical breakdown on surfaces[J].
J. American Ceramic Society,2001,18(10):2607-2616.
|
[15] |
王贵林.光学材料超精密研抛关键技术研究[D].长沙:国防科学技术大学,2002.
WANG G L. A study on key techniques in ultraprecision lapping and polishing for optical SIC materials[D]. Changsha:National University of Defense Technology,2002.(in Chinese)
|
[16] |
马占龙,王君林.超高精度光学元件加工技术[J].红外与 工程,42(6):1485-1490.
MA ZH L,WANG J L. Ultra-precision optical fabrication technology[J].
Infrared and Laser Engineering,42(6):1485-1490.(in Chinese)
|