Jul. 2016

Article Contents

Chinese Optics> 2016> 9(4): 483-490.

QI Zi-wen, LIU Bing-guo, ZHANG Zhong-hai, LU Bing-hui, LIU Guo-dong. Comparison of phase extraction algorithms in testing of phase defects with two-point interference[J]. Chinese Optics, 2016, 9(4): 483-490. doi: 10.3788/CO.20160904.0483

Citation:

QI Zi-wen, LIU Bing-guo, ZHANG Zhong-hai, LU Bing-hui, LIU Guo-dong. Comparison of phase extraction algorithms in testing of phase defects with two-point interference[J].Chinese Optics, 2016, 9(4): 483-490.doi:10.3788/CO.20160904.0483

Citation:

QI Zi-wen, LIU Bing-guo, ZHANG Zhong-hai, LU Bing-hui, LIU Guo-dong. Comparison of phase extraction algorithms in testing of phase defects with two-point interference[J].Chinese Optics, 2016, 9(4): 483-490.doi:10.3788/CO.20160904.0483

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Comparison of phase extraction algorithms in testing of phase defects with two-point interference

doi:10.3788/CO.20160904.0483

School of Electrical Engineering and Automation, Harbin Institute of Technology, Harbin 150001, China

Funds:

National Natural Science Foundation of ChinaNo. 61275096

More Information

Corresponding author:E-mail:lgd@hit.edu.cn
Received Date:11 Mar 2016
Rev Recd Date:15 Apr 2016
Publish Date:01 Aug 2016

Abstract

Abstract

Two-point interference is an important method in testing of phase defects in optical elements with large diameter. In order to analyze the effects of errors on phase extraction algorithms in two-point interference system, the system structure and theoretical model are given firstly. Based on it, the Hariharan 5-frame algorithm, 13-frame algorithm and the advanced iterative algorithm are studied and simulated considering the linear phase shift error, nonlinear phase shift error, intensity error and random vibration error. The result shows that the accuracy of 13-frame algorithm is generally higher than that of 5-frame algorithm and the effect of advanced iterative algorithm is better than the other two. When the errors are given according to the analysis, the RMS error of the advanced iterative algorithm is less than those of 5-frame algorithm and 13-frame algorithm, and the PV of advanced iterative algorithm is less than 0.5 nm steadily. This means that the error of advanced iterative algorithm is affected less by errors while vibration plays the major role in the errors discussed.
- phase defects,
- two-point interference,
- phase extraction algorithm,
- error analysis

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References (18)

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