紫外增强硅基成像探测器进展

张猛蛟; 蔡毅; 江峰; 钟海政; 王岭雪

doi:10.3788/CO.20191201.0019

Volume 12 Issue 1

Feb. 2019

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Chinese Optics > 2019 > 12(1): 19-37.

ZHANG Meng-jiao, CAI Yi, JIANG Feng, ZHONG Hai-zheng, WANG Ling-xue. Silicon-based ultraviolet photodetection: progress and prospects[J]. Chinese Optics, 2019, 12(1): 19-37. doi: 10.3788/CO.20191201.0019

Citation:

ZHANG Meng-jiao, CAI Yi, JIANG Feng, ZHONG Hai-zheng, WANG Ling-xue. Silicon-based ultraviolet photodetection: progress and prospects[J]. Chinese Optics, 2019, 12(1): 19-37. doi: 10.3788/CO.20191201.0019

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Silicon-based ultraviolet photodetection: progress and prospects

doi: 10.3788/CO.20191201.0019

ZHANG Meng-jiao^{1, 4
,},
CAI Yi^{1, 2},
JIANG Feng³,
ZHONG Hai-zheng³,
WANG Ling-xue^{1
,
,}

1.
School of Optics and Photonics, Beijing Institute of Technology, Beijing Key Laboratory of Nanophotonics and Ultrafine Optoelectronic Systems, Beijing 100081, China
2.
China Research and Development Academy of Machinery Equipment, Beijing 100089
3.
School of Material Science & Engineering, Beijing Institute of Technology, Beijing 100081, China
4.
East China Institute of Optoelectronic Integrated Device, Suzhou 215163, China

Funds:

National Natural Science Foundation of China 61471044

National key research and development program 2017YFC0110100

More Information

Corresponding author: WANG Ling-xue, E-mail:neobull@bit.edu.cn
Received Date: 03 Apr 2018
Rev Recd Date: 26 Apr 2018
Publish Date: 01 Feb 2019

Abstract

Abstract

Silicon-based photodetectors are beneficial for their reliability, integration, scalability and low cost. However, due to their shallow penetration depth for UV radiation, conventional silicon devices have very limited ultraviolet responses. Motivated by the progress of silicon-based semiconductor processing techniques and nanoscience, UV-enhanced silicon-based photodetectors have been well developed and broadly applied. In this paper, we review the progress of this technology, its materials, its processing techniques and its applications in astrophysics, biochemical analysis and corona detection, and discuss the challenges and future prospects of silicon-based UV detection in sensitive imaging technologies.
- silicon,
- ultraviolet,
- image sensor,
- imaging detection

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References(105)

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