Citation: | TANG Xing, WANG Qi, MA Xiao-jun, GAO Dang-zhong, WANG Zong-wei, MENG Jie. Determination of the inner-surface profile of a capsule using chromatic confocal spectroscopy[J].Chinese Optics, 2020, 13(2): 266-272.doi:10.3788/CO.20201302.0266 |
[1] |
LINDL J D, AMENDT P, BERGER R L,
et al.. The physics basis for ignition using indirect-drive targets on the National Ignition Facility[J].
Physics of Plasmas, 2004, 11(2):339-491.
doi:10.1063/1.1578638
|
[2] |
HAAN S W, LINDL J D, CALLAHAN D A,
et al.. Point design targets, specifications, and requirements for the 2010 ignition campaign on the National Ignition Facility[J].
Physics of Plasmas, 2011, 18(5):051001.
doi:10.1063/1.3592169
|
[3] |
MCEACHERN R L, MOORE C E, WALLACE R J. The design, performance, and application of an atomic force microscope-based profilometer[J].
Journal of Vacuum Science & Technology A, 1995, 13(3):983-989.
doi:10.1116-1.579662/
|
[4] |
STEPHENS R B, OLSON D, HUANG H,
et al.. Complete surface mapping of ICF shells[J].
Fusion Science and Technology, 2004, 45(2):210-213.
doi:10.13182/FST45-210
|
[5] |
赵学森, 孙涛, 马小军, 等.基于AFM的靶丸表面轮廓仪设计及其测量精度分析[J].纳米技术与精密工程, 2006, 4(4):307-310.
doi:10.3969/j.issn.1672-6030.2006.04.012
ZHAO X S, SUN T, MA X J,
et al.. Design of target profilometer based on AFM and its measure precision analysis[J].
Nanotechnology and Precision Engineering, 2006, 4(4):307-310. (in Chinese)
doi:10.3969/j.issn.1672-6030.2006.04.012
|
[6] |
赵学森, 高党忠, 马小军, 等.立式靶丸AFM表面轮廓仪系统精度测试[J].原子能科学技术, 2012, 46(8):1014-1018.
http://d.old.wanfangdata.com.cn/Periodical/yznkxjs201208024
ZHAO X S, GAO D ZH, MA X J,
et al.. Measure precision analysis of capsule vertical-AFM surface profiler system[J].
Atomic Energy Science and Technology, 2012, 46(8):1014-1018. (in Chinese)
http://d.old.wanfangdata.com.cn/Periodical/yznkxjs201208024
|
[7] |
HUANG H, KOZIOZIEMSKI B J, STEPHENS R B,
et al.. Quantitative radiography:Submicron dimension calibration for ICF ablator shell characterization[J].
Fusion Science and Technology, 2007, 51(4):519-524.
doi:10.13182/FST07-3
|
[8] |
DONG B, ZHANG Y, ZHANG W C,
et al.. Highly sensitive, wide dynamic range displacement sensor combining chromatic confocal system and phase-sensitive spectral optical coherence tomography[J].
Optics Express, 2017, 25(5):5426-5430.
doi:10.1364/OE.25.005426
|
[9] |
BOETTCHER T, GRONLE M, OSTEN W. Multi-layer topography measurement using a new hybrid single-shot technique:Chromatic Confocal Coherence Tomography (CCCT)[J].
Optics Express, 2017, 25(9):10204-10213.
doi:10.1364/OE.25.010204
|
[10] |
SEPPÄ J, NIEMELÄ K, LASSILA A. Metrological characterization methods for confocal chromatic line sensors and optical topography sensors[J].
Measurement Science and Technology, 2018, 29(5):054008.
doi:10.1088/1361-6501/aaad2b
|
[11] |
ZOU X C, ZHAO X S, LI G,
et al.. Non-contact on-machine measurement using a chromatic confocal probe for an ultra-precision turning machine[J].
The International Journal of Advanced Manufacturing Technology, 2017, 90(5-8):2163-2172.
doi:10.1007/s00170-016-9494-3
|
[12] |
刘志群, 易定容, 孔令华, 等.基于并行共聚焦显微系统的物方差动轴向测量[J].光学 精密工程, 2017, 25(6):1449-1457.
http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201706007
LIU ZH Q, YI D R, KONG L H,
et al.. Object-side based differential axial measurement based on parallel confocal microscopy[J].
Opt. Precision Eng., 2017, 25(6):1449-1457. (in Chinese)
http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201706007
|
[13] |
戴岑, 巩岩, 张昊, 等.微分干涉差共焦显微膜层微结构缺陷探测系统[J].中国光学, 2018, 11(2):255-264.
doi:10.3788/CO.20181102.0255
DAI C, GONG Y, ZHANG H,
et al.. Detection system of multilayer coating microstructure defects based on differential interference contrast confocal microscopy[J].
Chinese Optics, 2018, 11(2):255-264. (in Chinese)
doi:10.3788/CO.20181102.0255
|
[14] |
KUNKEL M, SCHULZE J. Noncontact measurement of central lens thickness[J].
Glass Science and Technology, 2005, 78(5):245-247.
http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=b172689671d297ad58601608ff1a6d3e
|
[15] |
马小军, 高党忠, 杨蒙生, 等.应用白光共焦光谱测量金属薄膜厚度[J].光学 精密工程, 2011, 19(1):17-22.
http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201101003
MA X J, GAO D ZH, YANG M SH,
et al.. Measurement of thickness of metal thin film by using chromatic confocal spectral technology[J].
Opt. Precision Eng., 2011, 19(1):17-22. (in Chinese)
http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201101003
|