Apr. 2020

Article Contents

Chinese Optics> 2020> 13(2): 411-425.

ZHAO Yun, LV Jin-guang, QIN Yu-xin, TAO Jin, LIANG Zhong-zhu, WANG Wei-biao, NI Qi-liang, MENG De-jia, LIANG Jing-qiu. Optimization design and experimental study of micro-Fourier transform spectrometer[J]. Chinese Optics, 2020, 13(2): 411-425. doi: 10.3788/CO.20201302.0411

Citation:

ZHAO Yun, LV Jin-guang, QIN Yu-xin, TAO Jin, LIANG Zhong-zhu, WANG Wei-biao, NI Qi-liang, MENG De-jia, LIANG Jing-qiu. Optimization design and experimental study of micro-Fourier transform spectrometer[J].Chinese Optics, 2020, 13(2): 411-425.doi:10.3788/CO.20201302.0411

Citation:

ZHAO Yun, LV Jin-guang, QIN Yu-xin, TAO Jin, LIANG Zhong-zhu, WANG Wei-biao, NI Qi-liang, MENG De-jia, LIANG Jing-qiu. Optimization design and experimental study of micro-Fourier transform spectrometer[J].Chinese Optics, 2020, 13(2): 411-425.doi:10.3788/CO.20201302.0411

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Optimization design and experimental study of micro-Fourier transform spectrometer

doi:10.3788/CO.20201302.0411

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds:National Natural Science Foundation(No.61627819, No.61575193, No.61805239, No.61727818, No.61735018);Jilin Province Science and Technology Development Plan(No.20190303063SF, No.20180201024GX, No.20150520101JH, No.20170204077GX, No.20190101012JH, No.20160204064GX); Jilin Province Young and Middle-aged Science and Technology Innovation Leaders and Team Project(No.20190101012JH); National Fund for Applied Optics Open Fund

More Information

Author Bio:
ZHAO Yun(1993—), male, born in Zibo City, Shandong Province.Master degree.In 2016, he obtained the bachelor's degree from Hefei University of Technology.Since 2016, he has been studying for the master degree in the CAS Changchun Institute of Optics, Fine Mechanics and Physics, where he is mainly engaged in the research of optical design.E-mail:1002803876@qq.com
LV Jin-guang(1984—), male, born in Jiaohe City, Jilin Province.Ph.D.and associate researcher.Mainly engaged in the research of micro optical systems design and optical information processing.E-mail:jinguanglv@163.com
LIANG Jing-qiu(1962—), female, born in Shenyang City, Liaoning Province. Doctoral supervisor. Mainly engaged in the research of micro optical systems, micro-optical electromechanical systems (MOEMS) and microstructure optics. E-mail:liangjq@ciomp.ac.cn
Corresponding author:LV Jin-guang, E-mail:jinguanglv@163.com; LIANG Jing-qiu, E-mail:liangjq@ciomp.ac.cn
Received Date:28 Feb 2019
Rev Recd Date:20 Mar 2019
Publish Date:01 Apr 2020

Abstract

Abstract

In order to achieve the goal of miniaturization and light weight of Fourier transform spectrometer, a light-weight grid beam splitter structure was designed instead of the traditional parallel plate beam splitter. The influence of the grid edge of the grid beam splitter on spectrum reconstruction was analyzed, and the tolerance of production error was proposed. The micro-Fourier transform spectrometer was modeled and simulated, and the optimal structure of the grid beam splitter was obtained. The spectral inversion was performed by system simulation, and the restored spectrum was obtained. The spectral error introduced by the grid beam splitter was calculated. The construction and debugging of the prototype was completed, and the recovered spectrum of the actual system was obtained, which proved the feasibility of the miniaturized system. Compared with the traditional Fourier transform spectrometer, the miniaturization system has the advantages of small volume and good stability, and can be used for online monitoring.
- micro-Fourier transform infrared spectrometer,
- light-weight grid beam splitter,
- spectrum reconstruction

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References (11)

References

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