Feb. 2011

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Chinese Optics> 2011> 4(1): 1-8.

LOSEV V F, PANCHENKO Yu N, DUDAREV V V, IVANOV N G, KONOVALOV I N, PAVLINSKY A V, PUCHIKIN A V. Development of discharge pulse repetition rate excimer lasers for different applications[J]. Chinese Optics, 2011, 4(1): 1-8.

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Development of discharge pulse repetition rate excimer lasers for different applications

Institute of High Current Electronics of Siberian Branch of Russian Academy of Sciences,Tomsk 634055,Russia

Funds:

Supported by Russian Foundation for Basic Research Project(No.10-08-90002a)

Received Date:11 Aug 2010
Rev Recd Date:13 Oct 2010
Publish Date:25 Feb 2011

Abstract

Abstract

The working parameters of the discharge pulse-periodic XeCl lasers with pulse duration of 25-40 ns are researched. Results demonstrate that the lasers generate the pulses of radiation with energies of 0.2-0.7 J and operate with a repetition rate up to 100 Hz. It is shown that the total laser efficiency of 2.6% and the intrinsic efficiency of 3.8% are realized with the pumping power of 2.8-3.3 MW/cm.
- excimer laser,
- pumping power,
- bulk discharge,
- preionization,
- laser efficiency,
- pulse duration,
- gas mixture

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References (1)

References

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