Feb. 2011

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Chinese Optics> 2011> 4(1): 66-71.

SHEN Yan-long, HUANG Ke, MA Lian-ying, ZHENG Guo-xin, WANG Da-hui. Optical element stability of high power excimer laser MOPA system[J]. Chinese Optics, 2011, 4(1): 66-71.

Citation:

SHEN Yan-long, HUANG Ke, MA Lian-ying, ZHENG Guo-xin, WANG Da-hui. Optical element stability of high power excimer laser MOPA system[J].Chinese Optics, 2011, 4(1): 66-71.

SHEN Yan-long, HUANG Ke, MA Lian-ying, ZHENG Guo-xin, WANG Da-hui. Optical element stability of high power excimer laser MOPA system[J]. Chinese Optics, 2011, 4(1): 66-71.

Citation:

SHEN Yan-long, HUANG Ke, MA Lian-ying, ZHENG Guo-xin, WANG Da-hui. Optical element stability of high power excimer laser MOPA system[J].Chinese Optics, 2011, 4(1): 66-71.

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Optical element stability of high power excimer laser MOPA system

State Key Laboratory of Laser Interaction with Matter, Northwest Institute of Nuclear Technology,Xi'an 710024,China

Received Date:16 Aug 2010
Rev Recd Date:24 Oct 2010
Publish Date:25 Feb 2011

Abstract

Abstract

In order to analyze the impacts of stability of optical elements on the target positioning in a high power excimer laser Master Oscillator Power Amplification(MOPA) system, an analyzing model for the system was established and a mirror mount was also designed according to the analyzing results to meet the need for the system experiment. Firstly, in light of the unique feature of high power excimer laser MOPA system, the beam path was effectively simplified, and a three dimensional layout model to analyze the system was established. Then, in terms of the model and the requirements of target positioning precision of the system, the stability request of every optical element in this system was obtained by using the three dimensional coordinate conversion and ray-tracing. Finally, the stability parameters of the mirror mount designed by ourselves were measured. The simulating results indicate that the rotations of mirrors and the drift of lens vertical to the optical axis are the chief factors affecting the target positioning precision. In addition, the rotations of mirrors in the main amplifiers round X and Y axes should be controlled less than 0.8 and 1.6 rad, respectively. The experimental results for the mirror mount designed point out that the rotations round X and Y axes are not more than 0.6 and 0.81 rad, respectively, which means that the tolerance of coordinate parameters of each optical element corresponding to the target positioning precision satisfies the requirement of the system.
- excimer laser,
- Master Oscillator Power Amplification(MOPA) system,
- coordinate conversion,
- ray-tracing,
- stability

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References (1)

References

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