Key structural parameters of 300 mm aperture reference flat mirror

[1] 苗二龙,张健,谷勇强,等. 用于光刻投影物镜检测的高精度菲佐干涉仪误差分析[J]. 中国 ,2010,37(8):2029-2034. MIAO E L,ZHANG J,GU Y Q, et al.. Measurement error analysis of high precision fizeau interferometer for lithography projection objective[J]. Chinese J. Lasers,2010,37(8):2029-2034.(in Chinese) [2] 武旭华,陈磊,王磊. Φ300 mm干涉仪参考镜的设计及测试[J]. 光学 精密工程 ,2007,15(8):1235-1240. WU X H,CH L,W L. Design and test of reference mirror in Φ300 mm interferometer[J]. Optics and Precision Eng.,2007,15(8):1235-1240.(in Chinese) [3] YODER P R Jr. 光机系统设计[M]. 北京:机械工业出版社,2008. YODER P R Jr. Opto-Meehanieal Systems Design[M]. Beijing:China Machine Press,2008.(in Chinese) [4] 孙天祥,杨力,吴永前,等. 基于弹性力学的应力加工方法有限元分析[J]. 强 与粒子束 ,2010,22(2):361-364. SUN T X,YANG L,WU Y Q, et al.. Finite element analysis of stressed mirror polishing based on elasticity mechanics[J]. High Power Laser Particle Beams,2010,22(2):361-364.(in Chinese) [5] 李婧. 变厚度圆板轴对称非线性分析 . 天津:天津大学 ,2004. LI J. Nonlinear analysis of spherical shells with arbitrarily variable thickness . Tianjin:Tianjin University,2004.(in Chinese) [6] 李福,阮萍,赵葆常,等. 胶紧固平面反射镜的有限元分析[J]. 光学技术 ,2006,32(6):896-899. LI F,RUAN P,ZHAO B CH, et al.. Finite element analysis of the plane mirror fastened by adhesive[J]. Opt. Technique,2006,32(6):896-899.(in Chinese) [7] BLAKE J N,FETH J R,SZAFRANICE B. Control of mode coupling errors:US,5377283 . 1994-12-27. [8] BLAKE J N,FETH J R. Configuration control of mode coupling errors:US,5327213 . 1994-7-5. [9] 蒋世磊,陈华强 .环氧树脂胶在光学部件粘接上的应用[J]. 中国胶粘剂 ,2004,14(3):1-4. JIANG SH L,CHEN H Q. Application of epoxy resin adhesivein optical instruments[J]. China Adhesives,2004,14(3):1-4.(in Chinese) [10] 徐荣伟,刘立人,刘宏展,等. 大型干涉仪镜子的支承设计与温度变形分析[J]. 光学学报 ,2005,25(6):809-815. XU R W,LIU L R,LIU H ZH, et al.. Support schemes and thermal deformation analysis of large aperture interferometer mirrors[J]. Acta Opt. Sinica,2005,25(6):809-815.(in Chinese)