Volume 4Issue 3
Jun. 2011
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TIAN Wei, WANG Ru-dong, WANG Ping, SUI Yong-xin, WANG Li-peng. Key structural parameters of 300 mm aperture reference flat mirror[J]. Chinese Optics, 2011, 4(3): 264-270.
Citation: TIAN Wei, WANG Ru-dong, WANG Ping, SUI Yong-xin, WANG Li-peng. Key structural parameters of 300 mm aperture reference flat mirror[J].Chinese Optics, 2011, 4(3): 264-270.

Key structural parameters of 300 mm aperture reference flat mirror

  • Received Date:15 Jan 2011
  • Rev Recd Date:15 Mar 2011
  • Publish Date:25 Jun 2011
  • In order to design the structures of large-aperture reference flat mirrors with high-precision, the shapes of a large-aperture reference flat mirror were studied under gravitational conditions. Firstly, the establishing method of the structure adhesive by finite element analysis was elaborated, and the finite element model of large-aperture reference flat mirror supported with adhered spots was established. Then, the influences of different number of adhered points and point distribution, different sizes of spots and support schemes on the shapes of large-aperture reference flat mirrors were researched. Finally, the structure for large-aperture flat mirror supported with adhered spots was designed. The experimental results indicate that by support scheme with 123 distributed and 5mm diameter adhered spots, the peak to valley(PV) value and RMS value of the reference surface is only 24.06 nm and 6.78 nm, respectively, which satisfies the requirement of shape precision of the large-aperture reference flat mirror.

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